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dc.date.accessioned2023-05-22T12:23:36Z
dc.date.available2023-05-22T12:23:36Z
dc.date.issued2017
dc.identifierdoi:10.19211/KUP9783737602792
dc.identifier.isbn978-3-7376-0279-2 (e-book)
dc.identifier.uriurn:nbn:de:0002-402794
dc.identifier.urihttp://hdl.handle.net/123456789/14733
dc.descriptionZugleich: Dissertation, Universität Kassel, 2016ger
dc.description.sponsorshipGerman Federal Environmental Foundationger
dc.language.isoengeng
dc.publisherkassel university press
dc.rightsUrheberrechtlich geschützt
dc.rights.urihttps://rightsstatements.org/page/InC/1.0/
dc.subject.ddc620
dc.subject.ddc690
dc.titleMicromirrors for Daylight Steering Applicationseng
dc.typeBuch
dcterms.abstractIn this research work electrostatically actuatable micromirrors for daylight steering applications were developed and fabricated. To improve the light steering capability of these mirrors by reflection and to gain maximum transmission of light in the non-actuated state, the mirror plane area was planarized by a newly developed method. In this case, so-called sub-structures were introduced in the mirror layer to stabilize it mechanically, comparable to corrugated structures on macroscopic scale. For the fabrication of these micromirrors a novel process based on nanoimprint lithography (NIL) was developed. Since NIL provides rapid, economical production and fabrication on a large scale, this process will allow the future transfer to an industrial fabrication, and thus ensure commercial availability at a reasonable price for the final daylighting system based on micromirrors.eng
dcterms.accessRightsopen access
dcterms.creatorWorapattrakul, Natalie
dcterms.dateAccepted2016-10-28
dcterms.extentx, 183 Seiten
dc.contributor.corporatenameKassel, Universität Kassel, Fachbereich Elektrotechnik / Informatikger
dc.contributor.refereeHillmer, Hartmut (Prof. Dr.)
dc.contributor.refereeLehmann, Peter (Prof. Dr.)
dc.contributor.refereeBangert, Axel (Prof. Dr.)
dc.contributor.refereeWitzigmann, Bernd (Prof. Dr.)
dc.publisher.placeKassel
dc.relation.isbn978-3-7376-0278-5 (print)
dc.subject.swdMEMSger
dc.subject.swdMikrooptikger
dc.subject.swdSpiegelger
dc.subject.swdMikrofertigungger
dc.subject.swdNanoprägenger
dc.subject.swdPlanartechnikger
dc.subject.swdTageslichtsystemger
dc.subject.swdSpiegelsystemger
dc.subject.swdMikroaktorger
dc.title.subtitlePlanarization of Micromirror Planes by Sub-Structure Implementation and Process Transfer to Nanoimprint Fabrication Technologyeng
dc.type.versionpublishedVersion
kup.iskuptrue
kup.subjectNaturwissenschaft, Technik, Informatik, Medizin
kup.typDissertation
kup.institutionFB 16 / Elektrotechnik / Informatik
ubks.nodoigentrue
kup.bindingSoftcover
kup.size17 x 24 cm


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