Date
2020-12-04Author
Heupel, JuliaPallmann, MaximilianKörber, JonathanMerz, RolfKopnarski, MichaelStöhr, RainerReithmaier, Johann PeterHunger, DavidPopov, CyrilMetadata
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Aufsatz
Fabrication and Characterization of Single-Crystal Diamond Membranes for Quantum Photonics with Tunable Microcavities
Abstract
The development of quantum technologies is one of the big challenges in modern research. A crucial component for many applications is an efficient, coherent spin–photon interface, and coupling single-color centers in thin diamond membranes to a microcavity is a promising approach. To structure such micrometer thin single-crystal diamond (SCD) membranes with a good quality, it is important to minimize defects originating from polishing or etching procedures. Here, we report on the fabrication of SCD membranes, with various diameters, exhibiting a low surface roughness down to 0.4 nm on a small area scale, by etching through a diamond bulk mask with angled holes. A significant reduction in pits induced by micromasking and polishing damages was accomplished by the application of alternating Ar/Cl2 + O2 dry etching steps. By a variation of etching parameters regarding the Ar/Cl2 step, an enhanced planarization of the surface was obtained, in particular, for surfaces with a higher initial surface roughness of several nanometers. Furthermore, we present the successful bonding of an SCD membrane via van der Waals forces on a cavity mirror and perform finesse measurements which yielded values between 500 and 5000, depending on the position and hence on the membrane thickness. Our results are promising for, e.g., an efficient spin–photon interface.
Citation
In: Micromachines Volume 11 / Issue 12 (2020-12-04) EISSN 2072-666XSponsorship
Gefördert durch den Publikationsfonds der Universität KasselCitation
@article{doi:10.17170/kobra-202012222891,
author={Heupel, Julia and Pallmann, Maximilian and Körber, Jonathan and Merz, Rolf and Kopnarski, Michael and Stöhr, Rainer and Reithmaier, Johann Peter and Hunger, David and Popov, Cyril},
title={Fabrication and Characterization of Single-Crystal Diamond Membranes for Quantum Photonics with Tunable Microcavities},
journal={Micromachines},
year={2020}
}
0500 Oax 0501 Text $btxt$2rdacontent 0502 Computermedien $bc$2rdacarrier 1100 2020$n2020 1500 1/eng 2050 ##0##http://hdl.handle.net/123456789/12368 3000 Heupel, Julia 3010 Pallmann, Maximilian 3010 Körber, Jonathan 3010 Merz, Rolf 3010 Kopnarski, Michael 3010 Stöhr, Rainer 3010 Reithmaier, Johann Peter 3010 Hunger, David 3010 Popov, Cyril 4000 Fabrication and Characterization of Single-Crystal Diamond Membranes for Quantum Photonics with Tunable Microcavities / Heupel, Julia 4030 4060 Online-Ressource 4085 ##0##=u http://nbn-resolving.de/http://hdl.handle.net/123456789/12368=x R 4204 \$dAufsatz 4170 5550 {{Einkristall}} 5550 {{Diamant}} 5550 {{Membran}} 5550 {{Nanophotonik}} 5550 {{Rauigkeit}} 7136 ##0##http://hdl.handle.net/123456789/12368
2020-12-23T09:06:48Z 2020-12-23T09:06:48Z 2020-12-04 doi:10.17170/kobra-202012222891 http://hdl.handle.net/123456789/12368 Gefördert durch den Publikationsfonds der Universität Kassel eng Namensnennung 4.0 International http://creativecommons.org/licenses/by/4.0/ single-crystal diamond membranes fiber-based microcavity nanophotonics micromasking roughness reduction 530 600 Fabrication and Characterization of Single-Crystal Diamond Membranes for Quantum Photonics with Tunable Microcavities Aufsatz The development of quantum technologies is one of the big challenges in modern research. A crucial component for many applications is an efficient, coherent spin–photon interface, and coupling single-color centers in thin diamond membranes to a microcavity is a promising approach. To structure such micrometer thin single-crystal diamond (SCD) membranes with a good quality, it is important to minimize defects originating from polishing or etching procedures. Here, we report on the fabrication of SCD membranes, with various diameters, exhibiting a low surface roughness down to 0.4 nm on a small area scale, by etching through a diamond bulk mask with angled holes. A significant reduction in pits induced by micromasking and polishing damages was accomplished by the application of alternating Ar/Cl2 + O2 dry etching steps. By a variation of etching parameters regarding the Ar/Cl2 step, an enhanced planarization of the surface was obtained, in particular, for surfaces with a higher initial surface roughness of several nanometers. Furthermore, we present the successful bonding of an SCD membrane via van der Waals forces on a cavity mirror and perform finesse measurements which yielded values between 500 and 5000, depending on the position and hence on the membrane thickness. Our results are promising for, e.g., an efficient spin–photon interface. open access Heupel, Julia Pallmann, Maximilian Körber, Jonathan Merz, Rolf Kopnarski, Michael Stöhr, Rainer Reithmaier, Johann Peter Hunger, David Popov, Cyril doi:10.3390/mi11121080 Einkristall Diamant Membran Nanophotonik Rauigkeit publishedVersion EISSN 2072-666X Issue 12 Micromachines Volume 11 false 1080
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